Inventor · disambiguated record
Martinus Wilhelmus Van Den Heuvel
Also filed as: VAN DEN HEUVEL MARTINUS WILHELMUS
4 granted patents·1 pending application·5 citations·filing 2007–2014
64Inventor score
Top patents by PatentIndex Score
5 records- 0177US9213246B2Fluid extraction system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 15, 2015·2 cites·20 claims
- 0274US8654309B2Fluid extraction system, lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 18, 2014·3 cites·20 claims
- 0347US7843548B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemASML NETHERLANDS BV·Filed 2007·Granted Nov 30, 2010·0 cites·19 claims
- 0446US2010110398A1Methods relating to immersion lithography and an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 0544US8976332B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemVAN DEN HEUVEL MARTINUS WILHELMUS·Filed 2010·Granted Mar 10, 2015·0 cites·20 claims
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