Inventor · disambiguated record
Kevin Gerber
Also filed as: GERBER KEVIN
4 granted patents·484 citations·filing 2006–2017
79Inventor score
Top patents by PatentIndex Score
4 records- 0198US9399228B2Method and apparatus for purging and plasma suppression in a process chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 26, 2016·428 cites·8 claims
- 0295US7704894B1Method of eliminating small bin defects in high throughput TEOS filmsNOVELLUS SYSTEMS INC·Filed 2006·Granted Apr 27, 2010·50 cites·21 claims
- 0381US8034725B1Method of eliminating small bin defects in high throughput TEOS filmsNOVELLUS SYSTEMS INC·Filed 2010·Granted Oct 11, 2011·5 cites·13 claims
- 0480US10161034B2Rapid chamber clean using concurrent in-situ and remote plasma sourcesLAM RES CORP·Filed 2017·Granted Dec 25, 2018·1 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →