Inventor · disambiguated record
Mutsumi Tsuda
Also filed as: TSUDA MUTSUMI
12 granted patents·1 pending application·225 citations·filing 1989–2017
89Inventor score
Top patents by PatentIndex Score
13 records- 0193US5760366AThin film forming apparatus using laser and magnetic fieldMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Jun 2, 1998·87 cites·3 claims
- 0291US5115167APlasma processorMITSUBISHI ELECTRIC CORP·Filed 1989·Granted May 19, 1992·55 cites·5 claims
- 0388US6110291AThin film forming apparatus using laserMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Aug 29, 2000·67 cites·3 claims
- 0476US8053254B2Apparatus for forming thin film and method of manufacturing semiconductor filmMITSUBISHI ELECTRIC CORP·Filed 2009·Granted Nov 8, 2011·4 cites·6 claims
- 0573US10833628B2Failure diagnostic method and failure diagnostic device of solar cell stringMITSUBISHI ELECTRIC CORP·Filed 2017·Granted Nov 10, 2020·1 cites·7 claims
- 0666US7790478B2Manufacturing method of semiconductor integrated circuit deviceRENESAS TECH CORP·Filed 2008·Granted Sep 7, 2010·3 cites·27 claims
- 0746US6756312B2Method of fabricating a semiconductor device including time-selective etching processMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Jun 29, 2004·1 cites·18 claims
- 0845US10187009B2Method for diagnosing solar cell module, and diagnostic circuit and diagnostic system for solar cell moduleMITSUBISHI ELECTRIC CORP·Filed 2015·Granted Jan 22, 2019·0 cites·10 claims
- 0944US10559659B2Power semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2016·Granted Feb 11, 2020·0 cites·17 claims
- 1043US8474403B2Apparatus for forming thin film and method of manufacturing semiconductor filmTSUDA MUTSUMI·Filed 2011·Granted Jul 2, 2013·0 cites·8 claims
- 1143US5146138APlasma processorMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Sep 8, 1992·7 cites·1 claims
- 1241US10622532B2Thermoelectric conversion module and method of manufacturing the sameMITSUBISHI ELECTRIC CORP·Filed 2016·Granted Apr 14, 2020·0 cites·8 claims
- 1335US2003222349A1Semiconductor device with multilayer interconnection structureMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
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