Inventor · disambiguated record
Robert J. Soave
Also filed as: SOAVE ROBERT · SOAVE ROBERT J
6 granted patents·238 citations·filing 1990–2004
86Inventor score
Files withCENTER FOR ADVANCED FIBEROPTIC2TOKYO ELECTRON LTD2CORNELL RES FOUNDATION INC1GALILEO ELECTRO OPTICS CORP1
Top patents by PatentIndex Score
6 records- 0189US5569355AMethod for fabrication of microchannel electron multipliersCENTER FOR ADVANCED FIBEROPTIC·Filed 1995·Granted Oct 29, 1996·76 cites·26 claims
- 0289US5568013AMicro-fabricated electron multipliersCENTER FOR ADVANCED FIBEROPTIC·Filed 1994·Granted Oct 22, 1996·90 cites·33 claims
- 0379US5544772AFabrication of a microchannel plate from a perforated siliconGALILEO ELECTRO OPTICS CORP·Filed 1995·Granted Aug 13, 1996·35 cites·23 claims
- 0470US7959970B2System and method of removing chamber residues from a plasma processing system in a dry cleaning processTOKYO ELECTRON LTD·Filed 2004·Granted Jun 14, 2011·12 cites·23 claims
- 0561US7183183B2Method for using ion implantation to treat the sidewalls of a feature in a low-k dielectric filmTOKYO ELECTRON LTD·Filed 2004·Granted Feb 27, 2007·12 cites·28 claims
- 0644US5087322ASelective metallization for high temperature semiconductorsCORNELL RES FOUNDATION INC·Filed 1990·Granted Feb 11, 1992·13 cites·21 claims
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