Inventor · disambiguated record
Jyh-Shiou Hsu
Also filed as: HSU JYH-SHIOU
13 granted patents·4 pending applications·154 citations·filing 2001–2024
89Inventor score
Top patents by PatentIndex Score
17 records- 0192US6569777B1Plasma etching method to form dual damascene with improved via profileTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 27, 2003·105 cites·20 claims
- 0291US12009242B2Wafer transport containerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 11, 2024·2 cites·20 claims
- 0386US11854851B2Interface toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·1 cites·19 claims
- 0479US11723152B2Oxygen and humidity control in storage deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 8, 2023·1 cites·19 claims
- 0577US7015089B2Method to improve etching of resist protective oxide (RPO) to prevent photo-resist peelingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 21, 2006·23 cites·7 claims
- 0676US12193164B2Oxygen and humidity control in storage deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 0774US6498106B1Prevention of defects formed in photoresist during wet etchingTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 24, 2002·19 cites·14 claims
- 0873US2025081356A1Oxygen and humidity control in storage deviceSEMICONDUCTOR MFG CO LID·Filed 2024·Application pending·0 cites
- 0972US2024087935A1Interface toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1070US2024282610A1Wafer transport containerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1169US9579697B2System and method of cleaning FOUPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Feb 28, 2017·2 cites·16 claims
- 1269US2025065254A1Laminar Gas Flow FilterTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1363US12172117B2Laminar gas flow filterTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 24, 2024·0 cites·20 claims
- 1463US9530617B2In-situ charging neutralizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 27, 2016·1 cites·20 claims
- 1548US10991604B2Method of manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 27, 2021·0 cites·20 claims
- 1639US7265053B2Trench photolithography rework for removal of photoresist residueTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Sep 4, 2007·0 cites·16 claims
- 1734US7001784B2Method to control spacer widthTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Feb 21, 2006·0 cites·39 claims
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