Inventor · disambiguated record
Dirk Rothweiler
Also filed as: ROTHWEILER DIRK
3 granted patents·86 citations·filing 2000–2004
75Inventor score
Top patents by PatentIndex Score
3 records- 0191US6570168B1Illumination system with a plurality of light sourcesZEISS STIFTUNG·Filed 2000·Granted May 27, 2003·55 cites·25 claims
- 0276US7071476B2Illumination system with a plurality of light sourcesZEISS CARL SMT AG·Filed 2003·Granted Jul 4, 2006·13 cites·43 claims
- 0375US7329886B2EUV illumination system having a plurality of light sources for illuminating an optical elementZEISS CARL SMT AG·Filed 2004·Granted Feb 12, 2008·18 cites·41 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →