Inventor · disambiguated record

Christine Corinne Mattheus

Also filed as: MATTHEUS CHRISTINE CORINNE

2 granted patents·1 pending application·15 citations·filing 2009–2014

59Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1 LEEWIS CHRISTIAN MARINUS1 MEESSEN HIERONYMUS JOHANNUS CHRISTIAAN1

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3 records

0188US9436099B2Lithographic focus and dose measurement using a 2-D targetASML NETHERLANDS BV·Filed 2014·Granted Sep 6, 2016·5 cites·11 claims
0285US8891061B2Lithographic focus and dose measurement using a 2-D targetLEEWIS CHRISTIAN MARINUS·Filed 2009·Granted Nov 18, 2014·10 cites·18 claims
0341US2011295555A1Method and System for Determining a Lithographic Process ParameterMEESSEN HIERONYMUS JOHANNUS CHRISTIAAN·Filed 2009·Application pending·0 cites

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