Inventor · disambiguated record
Hiroki Kiyama
Also filed as: KIYAMA HIROKI
9 granted patents·1 pending application·69 citations·filing 2006–2017
87Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0193US8963050B2Apparatus for and method of heat-treating thin film on surface of substrateKATO SHINICHI·Filed 2011·Granted Feb 24, 2015·19 cites·19 claims
- 0291US8852966B2Heat treatment method and heat treatment apparatus of thin filmKIYAMA HIROKI·Filed 2012·Granted Oct 7, 2014·15 cites·1 claims
- 0388US8145046B2Heat treatment apparatus and method for heating substrate by light irradiationKIYAMA HIROKI·Filed 2009·Granted Mar 27, 2012·14 cites·4 claims
- 0483US9607870B2Heat treatment apparatus and heat treatment method for heating substrate by irradiating substrate with flash of lightDAINIPPON SCREEN MFG·Filed 2013·Granted Mar 28, 2017·5 cites·4 claims
- 0581US8861944B2Heat treatment apparatus and method for heating substrate by light irradiationDAINIPPON SCREEN MFG·Filed 2012·Granted Oct 14, 2014·4 cites·4 claims
- 0680US8498525B2Heat treatment apparatus and method for heating substrate by light irradiationKIYAMA HIROKI·Filed 2011·Granted Jul 30, 2013·4 cites·5 claims
- 0779US8041198B2Heat treatment apparatus and method for heating substrate by photo-irradiationDAINIPPON SCREEN MFG·Filed 2009·Granted Oct 18, 2011·7 cites·14 claims
- 0863US9437448B2Substrate treatment method and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2013·Granted Sep 6, 2016·1 cites·7 claims
- 0950US9875919B2Heat treatment method for heating substrate by irradiating substrate with flash of lightSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 23, 2018·0 cites·3 claims
- 1039US2006291835A1Susceptor for heat treatment and heat treatment apparatusDAINIPPON SCREEN MFG·Filed 2006·Application pending·0 cites
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