Inventor · disambiguated record
Hartmut Brandenburg
Also filed as: BRANDENBURG HARTMUT
2 granted patents·3 pending applications·7 citations·filing 2002–2007
45Inventor score
Files withZEISS CARL SMT AG5
Top patents by PatentIndex Score
5 records- 0155US7133225B1Method of manufacturing an optical systemZEISS CARL SMT AG·Filed 2004·Granted Nov 7, 2006·7 cites·16 claims
- 0252US2008100930A1Optical measuring system, and a projection objectiveZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 0341US2004257675A1Optical measuring system, and a projection objectiveZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 0435US7123427B2Objective, particularly a projection objective for use in semiconductor lithographyZEISS CARL SMT AG·Filed 2002·Granted Oct 17, 2006·0 cites·13 claims
- 0531US2006274325A1Method of qualifying a diffraction grating and method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
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