Inventor · disambiguated record
Timothy Campbell
Also filed as: CAMPBELL TIMOTHY S · CAMPBELL TIMOTHY SCOTT
4 granted patents·1 pending application·36 citations·filing 2000–2006
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0175US7476951B2Selective isotropic etch for titanium-based materialsAGERE SYSTEMS INC·Filed 2006·Granted Jan 13, 2009·6 cites·15 claims
- 0274US6451660B1Method of forming bipolar transistors comprising a native oxide layer formed on a substrate by rinsing the substrate in ozonated waterAGERE SYST GUARDIAN CORP·Filed 2000·Granted Sep 17, 2002·18 cites·19 claims
- 0365US7078337B2Selective isotropic etch for titanium-based materialsAGERE SYSTEMS INC·Filed 2003·Granted Jul 18, 2006·11 cites·32 claims
- 0438US7157375B2Methods of downstream microwave photoresist removal and via clean, particularly following Stop-On TiN etchingAGERE SYSTEMS INC·Filed 2004·Granted Jan 2, 2007·1 cites·10 claims
- 0534US2005191863A1Semiconductor device contamination reduction in a fluorinated oxide deposition processFiled 2005·Application pending·0 cites
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