Inventor · disambiguated record
Sukjong Bae
Also filed as: BAE SUKJONG
4 granted patents·3 pending applications·2 citations·filing 2014–2024
57Inventor score
Top patents by PatentIndex Score
7 records- 0175US10056229B2Charged-particle beam exposure method and charged-particle beam correction methodSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Aug 21, 2018·2 cites·20 claims
- 0260US2024272544A1Method of manufacturing a photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0355US2024152062A1Mask exposure system and mask exposure methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0454US12276907B2Photoresist inspection apparatus, photoresist inspection method using the same, and electron beam exposure apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Apr 15, 2025·0 cites·13 claims
- 0554US2024302750A1Correction method of multi-beam exposure deviceSAMSUNG DISPLAY CO LTD·Filed 2024·Application pending·0 cites
- 0645US9323142B2Methods of reducing registration errors of photomasks and photomasks formed using the methodsSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Apr 26, 2016·0 cites·19 claims
- 0734US9588415B2Electron beam exposure system and methods of performing exposing and patterning processes using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Mar 7, 2017·0 cites·17 claims
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