Inventor · disambiguated record
Hsiu Lan Pang
Also filed as: PANG HSIU-LAN
5 granted patents·1 pending application·43 citations·filing 2006–2011
79Inventor score
Top patents by PatentIndex Score
6 records- 0189US7477396B2Methods and systems for determining overlay error based on target image symmetryNANOMETRICS INC·Filed 2006·Granted Jan 13, 2009·14 cites·14 claims
- 0284US7847939B2Overlay measurement targetNANOMETRICS INC·Filed 2008·Granted Dec 7, 2010·12 cites·24 claims
- 0375US8250497B2Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the sameHSU WEI TE·Filed 2009·Granted Aug 21, 2012·11 cites·6 claims
- 0474US8321821B2Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the sameKU YI SHA·Filed 2009·Granted Nov 27, 2012·4 cites·8 claims
- 0564US8139233B2System and method for via structure measurementKU YI SHA·Filed 2010·Granted Mar 20, 2012·2 cites·21 claims
- 0635US2012290239A1Thin metal film measurement methodKU YI-SHA·Filed 2011·Application pending·0 cites
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