Inventor · disambiguated record
Shwang-Ming Cheng
Also filed as: CHENG SHWANG-MING · JENG SHWANG-MING
6 granted patents·138 citations·filing 2004–2006
84Inventor score
Top patents by PatentIndex Score
6 records- 0195US7135402B2Sealing pores of low-k dielectrics using CxHyTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Nov 14, 2006·59 cites·16 claims
- 0294US7564136B2Integration scheme for Cu/low-k interconnectsTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Jul 21, 2009·31 cites·19 claims
- 0385US7115974B2Silicon oxycarbide and silicon carbonitride based materials for MOS devicesTAIWAN SEMICONDUCTOR MANFACTUR·Filed 2004·Granted Oct 3, 2006·34 cites·19 claims
- 0482US7160800B2Decreasing metal-silicide oxidation during wafer queue timeTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jan 9, 2007·8 cites·20 claims
- 0579US7314828B2Repairing method for low-k dielectric materialsTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Jan 1, 2008·6 cites·16 claims
- 0640US7405481B2Glue layer for adhesion improvement between conductive line and etch stop layer in an integrated circuit chipTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Jul 29, 2008·0 cites·23 claims
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