Inventor · disambiguated record
Ming-Feng Yoo
Also filed as: YOO MING-FENG
2 granted patents·2 pending applications·1 citations·filing 2006–2014
34Inventor score
Top patents by PatentIndex Score
4 records- 0159US8905124B2Temperature controlled loadlock chamberLIN CHUN-HSIEN·Filed 2007·Granted Dec 9, 2014·1 cites·15 claims
- 0252US9698030B2Temperature controlled loadlock chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 4, 2017·0 cites·20 claims
- 0347US2008047578A1Method for preventing clogging of reaction chamber exhaust linesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0440US2007240826A1Gas supply device and apparatus for gas etching or cleaning substratesTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
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