Inventor · disambiguated record

Hagen Federau

Also filed as: FEDERAU HAGEN

3 granted patents·2 pending applications·16 citations·filing 20072015

66Inventor score
Technology areasG03FG02B
Files withZEISS CARL SMT AG2HEINTEL WILLI1SCHAFFER DIRK1ZEISS CARL SMT GMBH1

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