Inventor · disambiguated record
Hiroyuki Shida
Also filed as: SHIDA HIROYUKI
9 granted patents·128 citations·filing 1995–2013
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0179US9698033B2Substrate storing containerMIRAIAL CO LTD·Filed 2012·Granted Jul 4, 2017·5 cites·6 claims
- 0278US5815396AVacuum processing device and film forming device and method using sameHITACHI LTD·Filed 1995·Granted Sep 29, 1998·51 cites·48 claims
- 0376US8960442B2Wafer storing containerOYAMA TAKAHARU·Filed 2011·Granted Feb 24, 2015·6 cites·4 claims
- 0474US5707500AVacuum processing equipment, film coating equipment and deposition methodHITACHI LTD·Filed 1995·Granted Jan 13, 1998·45 cites·9 claims
- 0569US9711385B2Substrate storage containerSHINETSU POLYMER CO·Filed 2013·Granted Jul 18, 2017·2 cites·9 claims
- 0660US9387960B2Substrate storing containerNAGASHIMA TSUYOSHI·Filed 2012·Granted Jul 12, 2016·1 cites·6 claims
- 0750US6224676B1Gas supply apparatus and film forming apparatusHITACHI LTD·Filed 1999·Granted May 1, 2001·18 cites·6 claims
- 0840US9768045B2Substrate storing containerMIRAIAL CO LTD·Filed 2012·Granted Sep 19, 2017·0 cites·4 claims
- 0938US8627959B2Substrate storage containerOHNUKI KAZUMASA·Filed 2009·Granted Jan 14, 2014·0 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →