Inventor · disambiguated record
Koshi Muta
Also filed as: MUTA KOSHI
10 granted patents·3 pending applications·8 citations·filing 2014–2023
80Inventor score
Files withTOKYO ELECTRON LTD13
Top patents by PatentIndex Score
13 records- 0181US9947556B2Substrate cleaning apparatus, substrate cleaning method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Apr 17, 2018·5 cites·12 claims
- 0268US9835948B2Developing method, developing apparatus, and recording mediumTOKYO ELECTRON LTD·Filed 2015·Granted Dec 5, 2017·2 cites·15 claims
- 0366US9568829B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 14, 2017·1 cites·14 claims
- 0454US9575411B2Developing apparatus, developing method and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 21, 2017·0 cites·11 claims
- 0554US2024012329A1Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0653US10921713B2Developing method, computer-readable storage medium and developing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Feb 16, 2021·0 cites·5 claims
- 0752US11031261B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 8, 2021·0 cites·9 claims
- 0852US10289004B2Developing apparatus, developing method and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 14, 2019·0 cites·8 claims
- 0952US10014190B2Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 3, 2018·0 cites·15 claims
- 1051US2024009697A1Liquid processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1150US10120285B2Developing method, developing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Nov 6, 2018·0 cites·14 claims
- 1244US10459340B2Developing method, computer-readable storage medium and developing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Oct 29, 2019·0 cites·9 claims
- 1333US2017032983A1Substrate processing apparatus, substrate processing method, maintenance method of substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →