Inventor · disambiguated record
Pieter Renaat Maria Hennus
Also filed as: HENNUS PIETER RENAAT MARIA
11 granted patents·2 pending applications·47 citations·filing 2004–2020
87Inventor score
Top patents by PatentIndex Score
13 records- 0187US7791709B2Substrate support and lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 7, 2010·11 cites·18 claims
- 0278US7365827B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 29, 2008·12 cites·34 claims
- 0368US8115905B2Lithographic apparatus and device manufacturing methodHENNUS PIETER RENAAT MARIA·Filed 2008·Granted Feb 14, 2012·2 cites·19 claims
- 0465US9136151B2ActuatorVAN DER BLIJ FREDRIK WILHELM·Filed 2011·Granted Sep 15, 2015·3 cites·16 claims
- 0561US7397539B2Transfer apparatus for transferring an object, lithographic apparatus employing such a transfer apparatus, and method of use thereofASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·10 cites·27 claims
- 0660US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 0754US7123349B2Lithographic projection assembly, substrate handling apparatus and substrate handling methodASML NETHERLANDS BV·Filed 2004·Granted Oct 17, 2006·5 cites·18 claims
- 0852US8860926B2Lithographic apparatus and device manufacturing methodHENNUS PIETER RENAAT MARIA·Filed 2011·Granted Oct 14, 2014·0 cites·20 claims
- 0950US7405810B2Method and apparatus for positioning a substrate on a substrate tableASML NETHERLANDS BV·Filed 2004·Granted Jul 29, 2008·3 cites·17 claims
- 1046US10578959B2Support apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 3, 2020·0 cites·20 claims
- 1142US2009148604A1Substrate Processing Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2008·Application pending·0 cites
- 1242US2008137055A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 1340US12449726B2Apparatus for assembly of a reticle assemblyASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
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