Inventor · disambiguated record
Steven Labovitz
Also filed as: LABOVITZ STEVEN · LABOVITZ STEVEN M
4 granted patents·31 citations·filing 1999–2011
71Inventor score
Top patents by PatentIndex Score
4 records- 0180US7599051B1Calibration of a substrate inspection toolKLA TENCOR TECH CORP·Filed 2006·Granted Oct 6, 2009·14 cites·39 claims
- 0264US9034539B2Controllable transmission and phase compensation of transparent materialOSHEMKOV SERGEY·Filed 2011·Granted May 19, 2015·2 cites·26 claims
- 0353US6210843B1Modulation of peripheral critical dimension on photomask with differential electron beam doseINTEL CORP·Filed 1999·Granted Apr 3, 2001·15 cites·20 claims
- 0444US8592770B2Method and apparatus for DUV transmission mappingBEN-ZVI GUY·Filed 2008·Granted Nov 26, 2013·0 cites·12 claims
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