Inventor
GUILLORN MICHAEL A
US235 patents
⚠️ This page may combine multiple inventors who share the name “GUILLORN MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
25 patentsUS9362355B1Jun 7, 2016
Nanosheet MOSFET with full-height air-gap spacer
IBM198 citations99
US7923337B2Apr 12, 2011
Fin field effect transistor devices with self-aligned source and drain regions
IBM234 citations99
US10074575B1Sep 11, 2018
Integrating and isolating nFET and pFET nanosheet transistors on a substrate
IBM45 citations98
US9997519B1Jun 12, 2018
Dual channel structures with multiple threshold voltages
IBM102 citations98
US9755017B1Sep 5, 2017
Co-integration of silicon and silicon-germanium channels for nanosheet devices
IBM48 citations98
US9647139B2May 9, 2017
Atomic layer deposition sealing integration for nanosheet complementary metal oxide semiconductor with replacement spacer
IBM34 citations98
US8927968B2Jan 6, 2015
Accurate control of distance between suspended semiconductor nanowires and substrate surface
IBM87 citations98
US7892945B2Feb 22, 2011
Nanowire mesh device and method of fabricating same
IBM97 citations98
US7893492B2Feb 22, 2011
Nanowire mesh device and method of fabricating same
IBM76 citations98
US9871140B1Jan 16, 2018
Dual strained nanosheet CMOS and methods for fabricating
IBM37 citations94
US9748404B1Aug 29, 2017
Method for fabricating a semiconductor device including gate-to-bulk substrate isolation
IBM32 citations94
US9728542B1Aug 8, 2017
High density programmable e-fuse co-integrated with vertical FETs
IBM37 citations94
US9721888B2Aug 1, 2017
Trench silicide with self-aligned contact vias
IBM21 citations94
US9653547B1May 16, 2017
Integrated etch stop for capped gate and method for manufacturing the same
IBM22 citations94
US9576817B1Feb 21, 2017
Pattern decomposition for directed self assembly patterns templated by sidewall image transfer
IBM40 citations94
US9911592B2Mar 6, 2018
Method for making nanosheet CMOS device integrating atomic layer deposition process and replacement gate structure
IBM13 citations93
US9853132B2Dec 26, 2017
Nanosheet MOSFET with full-height air-gap spacer
IBM17 citations93
US9508829B1Nov 29, 2016
Nanosheet MOSFET with full-height air-gap spacer
IBM22 citations93
US8716695B2May 6, 2014
Compressive (PFET) and tensile (NFET) channel strain in nanowire FETs fabricated with a replacement gate process
IBM16 citations93
US9831324B1Nov 28, 2017
Self-aligned inner-spacer replacement process using implantation
IBM14 citations92
US9306164B1Apr 5, 2016
Electrode pair fabrication using directed self assembly of diblock copolymers
IBM22 citations92
US8969965B2Mar 3, 2015
Fin-last replacement metal gate FinFET
IBM18 citations92
US8656322B1Feb 18, 2014
Fin design level mask decomposition for directed self assembly
IBM27 citations91
US10706200B2Jul 7, 2020
Generative adversarial networks for generating physical design layout patterns of integrated multi-layers
IBM9 citations84
US10699055B2Jun 30, 2020
Generative adversarial networks for generating physical design layout patterns
IBM9 citations84
UT BATTELLE LLC
8 patentsUS7408186B2Aug 5, 2008
Controlled alignment catalytically grown nanostructures
UT BATTELLE LLC92 citations98
US6858455B2Feb 22, 2005
Gated fabrication of nanostructure field emission cathode material within a device
UT BATTELLE LLC53 citations96
US7641863B2Jan 5, 2010
Nanoengineered membranes for controlled transport
UT BATTELLE LLC34 citations92
US7229692B2Jun 12, 2007
Nanoconduits and nanoreplicants
UT BATTELLE LLC11 citations92
US6692324B2Feb 17, 2004
Single self-aligned carbon containing tips
UT BATTELLE LLC30 citations92
US6649431B2Nov 18, 2003
Carbon tips with expanded bases grown with simultaneous application of carbon source and etchant gases
UT BATTELLE LLC32 citations92
US6958572B2Oct 25, 2005
Controlled non-normal alignment of catalytically grown nanostructures in a large-scale synthesis process
UT BATTELLE LLC15 citations90
US6982519B2Jan 3, 2006
Individually electrically addressable vertically aligned carbon nanofibers on insulating substrates
UT BATTELLE LLC37 citations88
CHANG JOSEPHINE
6 patentsUS8216902B2Jul 10, 2012
Nanomesh SRAM cell
CHANG JOSEPHINE50 citations97
US8084308B2Dec 27, 2011
Single gate inverter nanowire mesh
CHANG JOSEPHINE83 citations97
US8422273B2Apr 16, 2013
Nanowire mesh FET with multiple threshold voltages
CHANG JOSEPHINE39 citations94
US8586455B1Nov 19, 2013
Preventing shorting of adjacent devices
CHANG JOSEPHINE25 citations92
US8466451B2Jun 18, 2013
Single gate inverter nanowire mesh
CHANG JOSEPHINE17 citations92
US8395220B2Mar 12, 2013
Nanomesh SRAM cell
CHANG JOSEPHINE33 citations92
CHANG JOSEPHINE B
4 patentsUS8637359B2Jan 28, 2014
Fin-last replacement metal gate FinFET process
CHANG JOSEPHINE B71 citations97
US8592280B2Nov 26, 2013
Fin field effect transistor devices with self-aligned source and drain regions
CHANG JOSEPHINE B15 citations93
US8586449B1Nov 19, 2013
Raised isolation structure self-aligned to fin structures
CHANG JOSEPHINE B23 citations93
US8178400B2May 15, 2012
Replacement spacer for tunnel FETs
CHANG JOSEPHINE B21 citations93
GUILLORN MICHAEL A
1 patentGLOBALFOUNDRIES INC
1 patentBANGSARUNTIP SARUNYA
1 patentCOHEN GUY
1 patentCOHEN GUY M
1 patentANDERSON BRENT A
1 patentMCKNIGHT TIMOTHY E
1 patentShowing the top 50 of 235 patents by PatentIndex Score.