Inventor · disambiguated record
Mitsuya Utsuno
Also filed as: UTSUNO MITSUYA
7 granted patents·16 citations·filing 2018–2023
79Inventor score
Files withASM IP HOLDING BV7
Top patents by PatentIndex Score
7 records- 0193US10755922B2Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted depositionASM IP HOLDING BV·Filed 2019·Granted Aug 25, 2020·8 cites·19 claims
- 0287US12125700B2Method of forming high aspect ratio featuresASM IP HOLDING BV·Filed 2021·Granted Oct 22, 2024·2 cites·23 claims
- 0385US11643724B2Method of forming structures using a neutral beamASM IP HOLDING BV·Filed 2020·Granted May 9, 2023·1 cites·17 claims
- 0484US12129548B2Method of forming structures using a neutral beamASM IP HOLDING BV·Filed 2023·Granted Oct 29, 2024·0 cites·18 claims
- 0583US11646197B2Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted depositionASM IP HOLDING BV·Filed 2020·Granted May 9, 2023·1 cites·16 claims
- 0683US11626316B2Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structureASM IP HOLDING BV·Filed 2020·Granted Apr 11, 2023·1 cites·22 claims
- 0782US10811256B2Method for etching a carbon-containing featureASM IP HOLDING BV·Filed 2018·Granted Oct 20, 2020·3 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →