Inventor · disambiguated record
Ilan Berman
Also filed as: BERMAN ILAN
6 granted patents·307 citations·filing 1996–2000
88Inventor score
Technology areasH10P
Files withINTEL CORP6
Top patents by PatentIndex Score
6 records- 0189US5868857ARotating belt wafer edge cleaning apparatusINTEL CORP·Filed 1996·Granted Feb 9, 1999·91 cites·9 claims
- 0285US6475293B1Rotating belt wafer edge cleaning apparatusINTEL CORP·Filed 2000·Granted Nov 5, 2002·31 cites·7 claims
- 0384US5725414AApparatus for cleaning the side-edge and top-edge of a semiconductor waferINTEL CORP·Filed 1996·Granted Mar 10, 1998·82 cites·11 claims
- 0479US5901399AFlexible-leaf substrate edge cleaning apparatusINTEL CORP·Filed 1996·Granted May 11, 1999·53 cites·19 claims
- 0573US6092253AFlexible-leaf substrate edge cleaning apparatusINTEL CORP·Filed 1998·Granted Jul 25, 2000·38 cites·16 claims
- 0649US6357071B2Rotating belt wafer edge cleaning apparatusINTEL CORP·Filed 1998·Granted Mar 19, 2002·12 cites·21 claims
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