Inventor · disambiguated record
Yuhei Kuwahara
Also filed as: KUWAHARA YUHEI
2 granted patents·1 pending application·5 citations·filing 2011–2023
42Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0177US9418834B2System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrateTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·5 cites·20 claims
- 0253US2024120217A1Substrate treatment method, substrate treatment apparatus, and computer storage mediumTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0336US8367308B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2011·Granted Feb 5, 2013·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →