Inventor · disambiguated record
Frank Eisert
Also filed as: EISERT FRANK
6 granted patents·59 citations·filing 2003–2022
81Inventor score
Top patents by PatentIndex Score
6 records- 0188US7118449B1Method of manufacturing an optical elementZEISS CARL SMT AG·Filed 2004·Granted Oct 10, 2006·33 cites·19 claims
- 0282US7481543B1Mirror for use in a projection exposure apparatusZEISS CARL SMT AG·Filed 2006·Granted Jan 27, 2009·8 cites·10 claims
- 0368US9436101B2Optical arrangement and microlithographic projection exposure apparatus including sameSCHOEPPACH ARMIN·Filed 2012·Granted Sep 6, 2016·2 cites·27 claims
- 0467US7557902B2Projection objectiveZEISS CARL SMT AG·Filed 2003·Granted Jul 7, 2009·10 cites·25 claims
- 0560US7031428B2Substrate material for X-ray optical componentsSCHOTT AG·Filed 2004·Granted Apr 18, 2006·6 cites·28 claims
- 0653US12235097B2Diffractive optical element for a test interferometerZEISS CARL SMT GMBH·Filed 2022·Granted Feb 25, 2025·0 cites·20 claims
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