Inventor · disambiguated record
Tomiko Kamada
Also filed as: KAMADA TOMIKO
3 granted patents·1 pending application·5 citations·filing 2011–2015
57Inventor score
Top patents by PatentIndex Score
4 records- 0172US9305795B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Apr 5, 2016·3 cites·4 claims
- 0262US9412607B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 9, 2016·1 cites·5 claims
- 0361US9373520B2Multilayer film etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jun 21, 2016·1 cites·12 claims
- 0447US2013209666A1Evaporating apparatus and evaporating methodKAMADA TOMIKO·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →