Inventor · disambiguated record
Kojiro Yokozawa
Also filed as: YOKOZAWA KOJIRO
5 granted patents·22 citations·filing 2005–2015
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0193US8252701B2Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatusSASAJIMA RYOTA·Filed 2010·Granted Aug 28, 2012·16 cites·10 claims
- 0280US9966251B2Method of manufacturing semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted May 8, 2018·2 cites·14 claims
- 0380US9966252B2Method of manufacturing semiconductor device and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2015·Granted May 8, 2018·2 cites·15 claims
- 0474US9039838B2Method of manufacturing semiconductor device and substrate processing apparatusSASAJIMA RYOTA·Filed 2012·Granted May 26, 2015·2 cites·10 claims
- 0534US8963051B2Heat treatment apparatus and method of manufacturing substratesSHIMADA TOMOHARU·Filed 2005·Granted Feb 24, 2015·0 cites·13 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →