Inventor · disambiguated record
Masato Go
Also filed as: GO MASATO
4 granted patents·267 citations·filing 1989–2002
78Inventor score
Technology areasG03F
Files withNIKON CORP4
Top patents by PatentIndex Score
4 records- 0198US4970546AExposure control deviceNIKON CORP·Filed 1989·Granted Nov 13, 1990·236 cites·5 claims
- 0276US6603533B2Irradiation control method and apparatus for pulsed light source used in exposure apparatusNIKON CORP·Filed 2000·Granted Aug 5, 2003·19 cites·43 claims
- 0347US6011612AProcessing apparatus using a laser light sourceNIKON CORP·Filed 1997·Granted Jan 4, 2000·12 cites·23 claims
- 0434US6731377B2Laser output control method, laser apparatus and exposure apparatusNIKON CORP·Filed 2002·Granted May 4, 2004·0 cites·12 claims
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