Inventor · disambiguated record
Cristian Paduraru
Also filed as: PADURARU CRISTIAN
4 granted patents·1 pending application·5 citations·filing 2005–2012
65Inventor score
Top patents by PatentIndex Score
5 records- 0163US8051863B2Methods of and apparatus for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscusLAM RES CORP·Filed 2008·Granted Nov 8, 2011·2 cites·15 claims
- 0260US7479457B2Gas mixture for removing photoresist and post etch residue from low-k dielectric material and method of use thereofLAM RES CORP·Filed 2005·Granted Jan 20, 2009·1 cites·14 claims
- 0357US8293023B2System and method for monitoring wafer stressVALCORE JOHN·Filed 2009·Granted Oct 23, 2012·1 cites·2 claims
- 0455US8287656B2Methods for correlating gap value to meniscus stability in processing of a wafer surface by a recipe-controlled meniscusPENG G GRANT·Filed 2011·Granted Oct 16, 2012·1 cites·9 claims
- 0536US2014083463A1System and method for monitoring wafer stressVALCORE JOHN·Filed 2012·Application pending·0 cites
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