Inventor · disambiguated record
Philipp Bosselmann
Also filed as: BOSSELMANN PHILIPP
3 granted patents·37 citations·filing 2005–2010
70Inventor score
Top patents by PatentIndex Score
3 records- 0193US7473907B2Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illuminationZEISS CARL SMT AG·Filed 2005·Granted Jan 6, 2009·26 cites·29 claims
- 0283US7875865B2EUV illumination system with a system for measuring fluctuations of the light sourceZEISS CARL SMT AG·Filed 2008·Granted Jan 25, 2011·9 cites·29 claims
- 0371US8513628B2EUV illumination system with a system for measuring fluctuations of the light sourceSCHOLZ AXEL·Filed 2010·Granted Aug 20, 2013·2 cites·21 claims
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