Inventor · disambiguated record
Michael F. Meehan
Also filed as: MEEHAN MICHAEL F
4 granted patents·1 pending application·146 citations·filing 2000–2009
79Inventor score
Top patents by PatentIndex Score
5 records- 0190US6411426B1Apparatus, system, and method for active compensation of aberrations in an optical systemASML US INC·Filed 2000·Granted Jun 25, 2002·58 cites·10 claims
- 0289US6760167B2Apparatus, system, and method for precision positioning and alignment of a lens in an optical systemASML HOLDING NV·Filed 2003·Granted Jul 6, 2004·42 cites·19 claims
- 0388US6556364B2Apparatus, system, and method for precision positioning and alignment of a lens in an optical systemFiled 2001·Granted Apr 29, 2003·46 cites·22 claims
- 0437US2002089734A1Apparatus, system, and method for active compensation of aberrations in an optical systemFiled 2002·Application pending·0 cites
- 0535US8446562B2Actuator system using multiple piezoelectric actuatorsMEEHAN MICHAEL F·Filed 2009·Granted May 21, 2013·0 cites·22 claims
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