Inventor · disambiguated record
Khalid Manssouri
Also filed as: MANSSOURI KHALID
2 granted patents·1 citations·filing 2008–2013
30Inventor score
Top patents by PatentIndex Score
2 records- 0163US9715182B2Lithographic apparatus, substrate support system, device manufacturing method and control programASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·1 cites·21 claims
- 0237US8830442B2Servo control system, lithographic apparatus and control methodDE VOS YOUSSEF KAREL MARIA·Filed 2008·Granted Sep 9, 2014·0 cites·17 claims
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