Inventor · disambiguated record
Munja Kim
Also filed as: KIM MUNJA
4 granted patents·1 pending application·4 citations·filing 2015–2024
63Inventor score
Technology areasG03F
Top patents by PatentIndex Score
5 records- 0171US10274820B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Apr 30, 2019·1 cites·15 claims
- 0271US9952502B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameJEON HWANCHUL·Filed 2016·Granted Apr 24, 2018·2 cites·20 claims
- 0366US9612528B2Methods of manufacturing pellicles having graphite layersSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Apr 4, 2017·1 cites·20 claims
- 0461US2025068050A1Photomask assembly and semiconductor chip manufactured using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0545US9753367B2Methods of fabricating pellicles using supporting layerSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Sep 5, 2017·0 cites·19 claims
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