Inventor · disambiguated record
Kei Kirita
Also filed as: KIRITA KEI
5 granted patents·85 citations·filing 1976–1989
82Inventor score
Files withTOKYO SHIBAURA ELECTRIC CO5
Top patents by PatentIndex Score
5 records- 0164US4496843AMethod for producing metal ionsTOKYO SHIBAURA ELECTRIC CO·Filed 1982·Granted Jan 29, 1985·22 cites·11 claims
- 0263US4717645AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1985·Granted Jan 5, 1988·26 cites·15 claims
- 0351US5051338AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1989·Granted Sep 24, 1991·16 cites·6 claims
- 0450US4063973AMethod of making a semiconductor deviceTOKYO SHIBAURA ELECTRIC CO·Filed 1976·Granted Dec 20, 1977·14 cites·10 claims
- 0544US4897337AMethod and apparatus for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1987·Granted Jan 30, 1990·7 cites·6 claims
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