Inventor · disambiguated record
John A. Woollam
Also filed as: WOOLLAM JOHN A
64 granted patents·1,574 citations·filing 1976–2021
99Inventor score
Top patents by PatentIndex Score
64 records- 0198US7633625B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2007·Granted Dec 15, 2009·115 cites·2 claims
- 0296US7616319B1Spectroscopic ellipsometer and polarimeter systemsJAMES D WELCH·Filed 2007·Granted Nov 10, 2009·117 cites·67 claims
- 0395US6937341B1System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiationJ A WOOLLAM CO INC·Filed 2002·Granted Aug 30, 2005·96 cites·40 claims
- 0493US5373359AEllipsometerJ A WOOLLAM CO·Filed 1992·Granted Dec 13, 1994·141 cites·15 claims
- 0591US10073120B1Integrated vacuum-ultraviolet, mid and near-ultraviolet, visible, near, mid and far infrared and terahertz optical hall effect (OHE) instrument, and method of useJ A WOOLLAM CO INC·Filed 2017·Granted Sep 11, 2018·7 cites·26 claims
- 0691US9851294B1Integrated mid-infrared, far infrared and terahertz optical Hall effect (OHE) instrument, and method of useJ A WOOLLAM CO INC·Filed 2015·Granted Dec 26, 2017·9 cites·39 claims
- 0791US6982792B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 3, 2006·49 cites·26 claims
- 0891US5521706ASystem and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer systemJ A WOOLLAM CO INC·Filed 1994·Granted May 28, 1996·107 cites·15 claims
- 0990US8705032B2Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2013·Granted Apr 22, 2014·7 cites·21 claims
- 1089US8416408B1Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2010·Granted Apr 9, 2013·8 cites·11 claims
- 1189US7505134B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2006·Granted Mar 17, 2009·15 cites·22 claims
- 1288US7746471B1Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAM CO INC·Filed 2007·Granted Jun 29, 2010·13 cites·32 claims
- 1387US7768660B1Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sampleJ A WOOLLAM CO INC·Filed 2007·Granted Aug 3, 2010·12 cites·23 claims
- 1487US7277171B1Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systemsJ A WOOLLAN CO INC·Filed 2005·Granted Oct 2, 2007·18 cites·19 claims
- 1586US10026167B1Method of obtaining micrographs of transparent or semi-transparent specimens using anisotropic contrastJ A WOOLLAM CO INC·Filed 2015·Granted Jul 17, 2018·6 cites·38 claims
- 1686US7336361B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 26, 2008·15 cites·26 claims
- 1786US6859278B1Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systemsJ A WOOLLAM CO INC·Filed 2002·Granted Feb 22, 2005·29 cites·19 claims
- 1886US5666201AMultiple order dispersive optics system and method of useJ A WOOLLAM CO INC·Filed 1995·Granted Sep 9, 1997·95 cites·20 claims
- 1986US5504582ASystem and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer systemJ A WOOLLAM CO INC·Filed 1994·Granted Apr 2, 1996·83 cites·20 claims
- 2085US5757494ASystem and method for improving data acquisition capability in spectroscopic ellipsometersJ A WOOLLAM CO INC·Filed 1995·Granted May 26, 1998·77 cites·31 claims
- 2184US5956145ASystem and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 1998·Granted Sep 21, 1999·85 cites·21 claims
- 2283US7746472B1Automated ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2008·Granted Jun 29, 2010·8 cites·29 claims
- 2383US7345762B1Control of beam spot size in ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Mar 18, 2008·8 cites·21 claims
- 2483US5416588ASmall modulation ellipsometryUNIV NEBRASKA·Filed 1994·Granted May 16, 1995·66 cites·10 claims
- 2582US10101265B1Birefringence imaging chromatography based on highly ordered 3D nanostructuresSCHUBERT MATHIAS M·Filed 2015·Granted Oct 16, 2018·3 cites·47 claims
- 2682US8169611B2Terahertz-infrared ellipsometer system, and method of useHERZINGER CRAIG M·Filed 2009·Granted May 1, 2012·10 cites·23 claims
- 2782US7304737B1Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·8 cites·17 claims
- 2882US7304792B1System for sequentially providing aberation corrected electromagnetic radiation to a spot on a sample at multiple angles of incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·11 cites·9 claims
- 2982US7158231B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2003·Granted Jan 2, 2007·26 cites·28 claims
- 3080US7274450B1Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2004·Granted Sep 25, 2007·19 cites·9 claims
- 3179US7477388B1Sample masking in ellipsometer and the like systems including detection of substrate backside reflectionsJ A WOOLLAM CO INC·Filed 2006·Granted Jan 13, 2009·6 cites·20 claims
- 3279US7385697B2Sample analysis methodology utilizing electromagnetic radiationJ A WOOLLAM CO INC·Filed 2004·Granted Jun 10, 2008·19 cites·25 claims
- 3379US7245376B2Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeterJ A WOOLLAM CO INC·Filed 2005·Granted Jul 17, 2007·9 cites·33 claims
- 3479US7215424B1Broadband ellipsometer or polarimeter system including at least one multiple element lensJ A WOOLLAM CO INC·Filed 2005·Granted May 8, 2007·6 cites·23 claims
- 3578US7623237B1Sample investigating systemJ A WOOLLAM CO INC·Filed 2006·Granted Nov 24, 2009·5 cites·11 claims
- 3677US5582646AEllipsometer/polarimeter based process monitor and control system suitable for simultaneous retrofit on molecular beam epitaxy system RHEED/LEED interface system, and method of useJ A WOOLLAM CO INC·Filed 1994·Granted Dec 10, 1996·43 cites·24 claims
- 3776US7385698B1System and method of selectively monitoring sample front and backside reflections in ellipsometer and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Jun 10, 2008·4 cites·20 claims
- 3876US7295313B1Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filtersJ A WOOLLAM CO INC·Filed 2004·Granted Nov 13, 2007·12 cites·17 claims
- 3975US7349092B1System for reducing stress induced effects during determination of fluid optical constantsJ A WOOLLAM CO INC·Filed 2005·Granted Mar 25, 2008·4 cites·18 claims
- 4074US5805285AMultiple order dispersive optics system and method of useJ A WOOLLAM CO INC·Filed 1997·Granted Sep 8, 1998·43 cites·17 claims
- 4173US7327456B1Spectrophotometer, ellipsometer, polarimeter and the like systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 5, 2008·7 cites·9 claims
- 4272US7209234B2Combined use of oscillating means and ellipsometry to determine uncorrelated effective thickness and optical constants of material deposited from a fluidJ A WOOLLAM CO INC·Filed 2006·Granted Apr 24, 2007·3 cites·11 claims
- 4371US7193710B1Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lensesJ A WOOLLAM CO INC·Filed 2004·Granted Mar 20, 2007·9 cites·5 claims
- 4471US6940595B1Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filtersJ A WOOLLAM CO INC·Filed 2002·Granted Sep 6, 2005·14 cites·28 claims
- 4569US7265838B1Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the likeJ A WOOLLAM CO INC·Filed 2004·Granted Sep 4, 2007·8 cites·32 claims
- 4668US7283234B1Use of ellipsometry and surface plasmon resonance in monitoring thin film deposition or removal from a substrate surfaceJ A WOOLLAM CO INC·Filed 2004·Granted Oct 16, 2007·7 cites·19 claims
- 4768US4193827AAtomic hydrogen storageNASA·Filed 1977·Granted Mar 18, 1980·13 cites·1 claims
- 4867US7522279B1System for and method of investigating the exact same point on a sample substrate with multiple wavelengthsJ A WOOLLAM CO INC·Filed 2006·Granted Apr 21, 2009·4 cites·11 claims
- 4967US4077788AAtomic hydrogen storage method and apparatusUS OF AMERICA ASTHE ADMINISTRA·Filed 1976·Granted Mar 7, 1978·20 cites·6 claims
- 5066US5657126AEllipsometerUNIV NEBRASKA·Filed 1995·Granted Aug 12, 1997·33 cites·10 claims
Showing the top 50 of 64 patent records by PatentIndex Score.
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