Inventor · disambiguated record
Martin Lowisch
Also filed as: LOWISCH MARTIN
6 granted patents·21 citations·filing 2003–2011
77Inventor score
Top patents by PatentIndex Score
6 records- 0167US7557902B2Projection objectiveZEISS CARL SMT AG·Filed 2003·Granted Jul 7, 2009·10 cites·25 claims
- 0261US7042550B2Device manufacturing method and computer programASML NETHERLANDS BV·Filed 2003·Granted May 9, 2006·8 cites·19 claims
- 0359US7914955B2Masks, lithography device and semiconductor componentZEISS CARL SMT GMBH·Filed 2009·Granted Mar 29, 2011·0 cites·15 claims
- 0456US7572556B2Masks, lithography device and semiconductor componentZEISS CARL SMT AG·Filed 2003·Granted Aug 11, 2009·3 cites·16 claims
- 0555US8268518B2Method and lithography device with a mask reflecting lightMANN HANS-JUERGEN·Filed 2011·Granted Sep 18, 2012·0 cites·17 claims
- 0630US7576934B2Groupwise corrected objectiveZEISS CARL SMT AG·Filed 2007·Granted Aug 18, 2009·0 cites·10 claims
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