Inventor · disambiguated record
Jaehyuck Choi
Also filed as: CHOI JAEHYUCK
7 granted patents·11 citations·filing 2013–2018
76Inventor score
Top patents by PatentIndex Score
7 records- 0192US9703186B2Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jul 11, 2017·7 cites·13 claims
- 0271US10274820B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Apr 30, 2019·1 cites·15 claims
- 0371US9952502B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameJEON HWANCHUL·Filed 2016·Granted Apr 24, 2018·2 cites·20 claims
- 0466US9612528B2Methods of manufacturing pellicles having graphite layersSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Apr 4, 2017·1 cites·20 claims
- 0552US9223199B2Photomask and method of forming the sameSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted Dec 29, 2015·0 cites·11 claims
- 0650US9766540B2Method of forming photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Sep 19, 2017·0 cites·9 claims
- 0740US10087348B2Pellicle including a water-soluble adhesive and photomask assembly including the pellicleSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Oct 2, 2018·0 cites·18 claims
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