Inventor · disambiguated record
Kazuyoshi Oonuki
Also filed as: OONUKI KAZUYOSHI
4 granted patents·17 citations·filing 1997–2001
72Inventor score
Technology areasH01J
Files withHITACHI LTD4
Top patents by PatentIndex Score
4 records- 0160US6246064B1Electron beam drawing apparatusHITACHI LTD·Filed 2000·Granted Jun 12, 2001·4 cites·4 claims
- 0252US6337486B2Electron beam drawing process and electron beam drawing apparatusHITACHI LTD·Filed 2001·Granted Jan 8, 2002·2 cites·8 claims
- 0345US6127683AElectron beam drawing apparatusHITACHI LTD·Filed 1999·Granted Oct 3, 2000·7 cites·6 claims
- 0437US5972772AElectron beam drawing processHITACHI LTD·Filed 1997·Granted Oct 26, 1999·4 cites·4 claims
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