Inventor · disambiguated record
Yung-Tsun Lo
Also filed as: LO YUNG-TSUN
11 granted patents·1 pending application·121 citations·filing 1995–2002
90Inventor score
Top patents by PatentIndex Score
12 records- 0166US6228753B1Method of fabricating a bonding pad structure for improving the bonding pad surface qualityWORLDWIDE SEMICONDUCTOR MFG·Filed 1999·Granted May 8, 2001·34 cites·19 claims
- 0264US5942041ANon-sticking semi-conductor wafer clamp and method of making sameMOSEL VITELIC INC·Filed 1996·Granted Aug 24, 1999·30 cites·12 claims
- 0361US6688948B2Wafer surface protection methodTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Feb 10, 2004·8 cites·12 claims
- 0444US6030893AChemical vapor deposition of tungsten(W-CVD) process for growing low stress and void free interconnectMOSEL VITELIC INC·Filed 1996·Granted Feb 29, 2000·15 cites·28 claims
- 0538US6190928B1Method for actually measuring misalignment of viaMOSEL VITELIC INC·Filed 1998·Granted Feb 20, 2001·8 cites·8 claims
- 0636US5963830AMethod of forming a TiN/W barrier layer for a hot Al plugMOSEL VITELIC INC·Filed 1997·Granted Oct 5, 1999·8 cites·5 claims
- 0734US6096645AMethod of making IC devices having stable CVD titanium nitride filmsMOSEL VITELIC INC·Filed 1998·Granted Aug 1, 2000·7 cites·4 claims
- 0833US5643632ATungsten chemical vapor deposition process for suppression of volcano formationMOSEL VITELIC INC·Filed 1995·Granted Jul 1, 1997·4 cites·5 claims
- 0933US2004224501A1Manufacturing method for making tungsten-plug in an intergrated circuit device without volcano phenomenaFiled 2002·Application pending·0 cites
- 1029US5908659AMethod for reducing the reflectivity of a silicide layerMOSEL VITELIC INC·Filed 1997·Granted Jun 1, 1999·3 cites·15 claims
- 1125US5966626AMethod for stabilizing a silicon structure after ion implantationMOSEL VITELIC INC·Filed 1996·Granted Oct 12, 1999·2 cites·8 claims
- 1220US5804091AMethod of preventing defects and particles produced after tungsten etch backMOSEL VITELIC INC·Filed 1996·Granted Sep 8, 1998·2 cites·13 claims
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