Inventor · disambiguated record

Hideki Odajima

Also filed as: ODAJIMA HIDEKI

1 granted patent·15 citations·filing 1994–1994

37Inventor score

Technology areasC23C

Files withIWATANI & CO1

Top patents by PatentIndex Score

1 record

0146US5421902ANon-plasma cleaning method for semiconductor manufacturing apparatusIWATANI & CO·Filed 1994·Granted Jun 6, 1995·15 cites·2 claims

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