Inventor · disambiguated record
Shigenori Hayashi
Also filed as: HAYASHI SHIGENORI
82 granted patents·3 pending applications·5,144 citations·filing 1987–2019
99Inventor score
Files withSEMICONDUCTOR ENERGY LAB56MATSUSHITA ELECTRIC INDUSTRIAL CO LTD16PANASONIC CORP6RICOH KK3HAYASHI SHIGENORI1
Top patents by PatentIndex Score
85 records- 0199US5183511APhoto CVD apparatus with a glow discharge systemSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Feb 2, 1993·532 cites·12 claims
- 0298US6171674B1Hard carbon coating for magnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Jan 9, 2001·121 cites·175 claims
- 0398US6030667AApparatus and method for applying RF power apparatus and method for generating plasma and apparatus and method for processing with plasmaMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Feb 29, 2000·194 cites·6 claims
- 0498US5932302AMethod for fabricating with ultrasonic vibration a carbon coatingSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Aug 3, 1999·125 cites·36 claims
- 0598US5578130AApparatus and method for depositing a filmSEMICONDUCTOR ENERGY LAB·Filed 1994·Granted Nov 26, 1996·283 cites·18 claims
- 0698US5549780AMethod for plasma processing and apparatus for plasma processingSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Aug 27, 1996·320 cites·15 claims
- 0798US5427824ACVD apparatusSEMICONDUCTOR ENERGY LAB·Filed 1992·Granted Jun 27, 1995·352 cites·14 claims
- 0897US6468617B1Apparatus for fabricating coating and method of fabricating the coatingSEMICONDUCTOR ENERGY LAB·Filed 1999·Granted Oct 22, 2002·103 cites·52 claims
- 0997US6183816B1Method of fabricating the coatingSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Feb 6, 2001·111 cites·68 claims
- 1097US4950624AMethod of depositing films using photo-CVD with chamber plasma cleaningSEMICONDUCTOR ENERGY LAB·Filed 1988·Granted Aug 21, 1990·356 cites·6 claims
- 1196US6835523B1Apparatus for fabricating coating and method of fabricating the coatingSEMICONDUCTOR ENERGY LAB·Filed 1999·Granted Dec 28, 2004·96 cites·148 claims
- 1296US5288684APhotochemical vapor phase reaction apparatus and method of causing a photochemical vapor phase reactionSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Feb 22, 1994·608 cites·20 claims
- 1395US5928528APlasma treatment method and plasma treatment systemMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Jul 27, 1999·190 cites·22 claims
- 1494US5989672AMagnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Nov 23, 1999·55 cites·97 claims
- 1594US5240801AImage-forming member for electrophotography and manufacturing method for the sameSEMICONDUCTOR ENERGY LAB·Filed 1992·Granted Aug 31, 1993·53 cites·32 claims
- 1693US5238705ACarbonaceous protective films and method of depositing the sameSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Aug 24, 1993·58 cites·9 claims
- 1793US5221427APlasma generating device and method of plasma processingSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Jun 22, 1993·151 cites·12 claims
- 1892US6667246B2Wet-etching method and method for manufacturing semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Dec 23, 2003·75 cites·10 claims
- 1992US5198724APlasma processing method and plasma generating deviceSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Mar 30, 1993·80 cites·21 claims
- 2091US5230931APlasma-assisted cvd of carbonaceous films by using a bias voltageSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Jul 27, 1993·81 cites·9 claims
- 2190US7700164B2Apparatus for fabricating coating and method of fabricating the coatingSEMICONDUCTOR ENERGY LAB·Filed 2004·Granted Apr 20, 2010·25 cites·10 claims
- 2290US6194047B1Magnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Feb 27, 2001·39 cites·49 claims
- 2389US6001431AProcess for fabricating a magnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1996·Granted Dec 14, 1999·60 cites·25 claims
- 2489US5304407AMethod for depositing a filmSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Apr 19, 1994·69 cites·21 claims
- 2589US5059502AElectrophotographic photoconductorRICOH KK·Filed 1989·Granted Oct 22, 1991·32 cites·24 claims
- 2688US7495298B2Insulating buffer film and high dielectric constant semiconductor device and method for fabricating the samePANASONIC CORP·Filed 2006·Granted Feb 24, 2009·17 cites·7 claims
- 2788US5637373AMagnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Jun 10, 1997·28 cites·27 claims
- 2887US5838111APlasma generator with antennas attached to top electrodesMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Nov 17, 1998·53 cites·22 claims
- 2987US5256509AImage-forming member for electrophotography and manufacturing method for the sameSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Oct 26, 1993·33 cites·33 claims
- 3086US5525447AElectrophotographic photoconductorRICOH KK·Filed 1994·Granted Jun 11, 1996·31 cites·6 claims
- 3183US5674366AMethod and apparatus for fabrication of dielectric thin filmMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Oct 7, 1997·59 cites·12 claims
- 3283US5656406AElectrophotographic photoconductor with amorphous carbon overlayerRICOH KK·Filed 1995·Granted Aug 12, 1997·33 cites·2 claims
- 3382US8574972B2Method for fabricating semiconductor device and plasma doping apparatusSASAKI YUICHIRO·Filed 2010·Granted Nov 5, 2013·5 cites·24 claims
- 3482US6258434B1Magnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1999·Granted Jul 10, 2001·22 cites·19 claims
- 3580US5369336APlasma generating deviceSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Nov 29, 1994·62 cites·13 claims
- 3678US7465618B2Semiconductor device and method for fabricating the samePANASONIC CORP·Filed 2006·Granted Dec 16, 2008·7 cites·5 claims
- 3778US5185179APlasma processing method and products thereofSEMICONDUCTOR ENERGY LAB·Filed 1989·Granted Feb 9, 1993·34 cites·10 claims
- 3877US5719740ACapacitance sensorMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Feb 17, 1998·34 cites·5 claims
- 3977US5147822APlasma processing method for improving a package of a semiconductor deviceSEMICONDUCTOR ENERGY LAB·Filed 1991·Granted Sep 15, 1992·57 cites·11 claims
- 4076US11401122B2Paper sheet processing deviceLAUREL PREC MACHINES CO LTD·Filed 2019·Granted Aug 2, 2022·2 cites·6 claims
- 4176US6191492B1Electronic device including a densified regionSEMICONDUCTOR ENERGY LAB·Filed 1993·Granted Feb 20, 2001·52 cites·35 claims
- 4276US6165582AMagnetic recording mediumSEMICONDUCTOR ENERGY LAB·Filed 1997·Granted Dec 26, 2000·17 cites·65 claims
- 4375US7083873B2Magnetic recording medium including a diamond-like carbon protective film with hydrogen and at least two additional elementsSEMICONDUCTOR ENERGY LAB·Filed 2003·Granted Aug 1, 2006·7 cites·20 claims
- 4472US7391592B2Magnetic recording medium including a diamond-like carbon protective film and at least two additional elementsSEMICONDUCTOR ENERGY LAB·Filed 2006·Granted Jun 24, 2008·1 cites·28 claims
- 4572US5145711ACyclotron resonance chemical vapor deposition method of forming a halogen-containing diamond on a substrateSEMICONDUCTOR ENERGY LAB·Filed 1990·Granted Sep 8, 1992·31 cites·10 claims
- 4671US5507080AMethod of manufacturing a capacitance sensorMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted Apr 16, 1996·26 cites·8 claims
- 4770US8216922B2Plasma doping methodHAYASHI SHIGENORI·Filed 2011·Granted Jul 10, 2012·3 cites·20 claims
- 4870US7488655B2Method for fabricating semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Granted Feb 10, 2009·14 cites·53 claims
- 4968US7094639B2Method for fabricating semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Aug 22, 2006·9 cites·24 claims
- 5068US6756670B1Electronic device and its manufacturing methodSEMICONDUCTOR ENERGY LAB·Filed 2000·Granted Jun 29, 2004·15 cites·30 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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