Inventor · disambiguated record
Mayuka Oosaki
Also filed as: OOSAKI MAYUKA
11 granted patents·90 citations·filing 2004–2011
90Inventor score
Top patents by PatentIndex Score
11 records- 0190US7807980B2Charged particle beam apparatus and methods for capturing images using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 5, 2010·11 cites·7 claims
- 0290US7476857B2Tool-to-tool matching control method and its system for scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 13, 2009·10 cites·28 claims
- 0390US7408155B2Measuring method and its apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·16 cites·10 claims
- 0489US8003940B2Tool-to-tool matching control method and its system for scanning electron microscopeHITACHI HIGH TECH CORP·Filed 2009·Granted Aug 23, 2011·9 cites·7 claims
- 0589US7408154B2Scanning electron microscope, method for measuring a dimension of a pattern using the same, and apparatus for correcting difference between scanning electron microscopesHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 5, 2008·12 cites·13 claims
- 0687US7399964B2Electron microscope, measuring method using the same, electron microscope system, and method for controlling the systemHITACHI HIGH TECH CORP·Filed 2005·Granted Jul 15, 2008·11 cites·10 claims
- 0779US7164127B2Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Jan 16, 2007·16 cites·17 claims
- 0874US8502144B2Tool-to-tool matching control method and its system for scanning electron microscopeOOSAKI MAYUKA·Filed 2011·Granted Aug 6, 2013·3 cites·9 claims
- 0967US7605364B2Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 20, 2009·1 cites·15 claims
- 1065US8207512B2Charged particle beam apparatus and methods for capturing images using the sameSHISHIDO CHIE·Filed 2010·Granted Jun 26, 2012·1 cites·8 claims
- 1163US8022356B2Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscopeHITACHI HIGH TECH CORP·Filed 2009·Granted Sep 20, 2011·0 cites·10 claims
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