Inventor · disambiguated record
Austin Ngo
Also filed as: NGO AUSTIN
10 granted patents·232 citations·filing 2015–2019
90Inventor score
Technology areasH10P
Files withLAM RES CORP10
Top patents by PatentIndex Score
10 records- 0197US10062599B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2016·Granted Aug 28, 2018·30 cites·24 claims
- 0297US9881820B2Front opening ring podLAM RES CORP·Filed 2016·Granted Jan 30, 2018·124 cites·29 claims
- 0396US10124492B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2016·Granted Nov 13, 2018·25 cites·26 claims
- 0496US10062589B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·20 cites·19 claims
- 0596US10062590B2Front opening ring podLAM RES CORP·Filed 2017·Granted Aug 28, 2018·23 cites·19 claims
- 0686US9779977B2End effector assembly for clean/dirty substrate handlingLAM RES CORP·Filed 2015·Granted Oct 3, 2017·5 cites·16 claims
- 0784US10427307B2Automated replacement of consumable parts using end effectors interfacing with plasma processing systemLAM RES CORP·Filed 2017·Granted Oct 1, 2019·3 cites·15 claims
- 0881US10304717B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2017·Granted May 28, 2019·2 cites·20 claims
- 0963US10770339B2Automated replacement of consumable parts using interfacing chambersLAM RES CORP·Filed 2019·Granted Sep 8, 2020·0 cites·20 claims
- 1052US10707113B2End effector assembly for clean/dirty substrate handlingLAM RES CORP·Filed 2017·Granted Jul 7, 2020·0 cites·7 claims
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