Inventor · disambiguated record

Peter Berge

Also filed as: BERGE PETER TEN

2 granted patents·10 citations·filing 2005–2006

50Inventor score

Technology areasG03F H10W

Files withASML NETHERLANDS BV2

Top patents by PatentIndex Score

2 records

0180US7562686B2Method and system for 3D alignment in wafer scale integrationASML NETHERLANDS BV·Filed 2005·Granted Jul 21, 2009·10 cites·11 claims
0241US7567340B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 28, 2009·0 cites·21 claims

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