Inventor · disambiguated record
Hirohiko Nakata
Also filed as: NAKATA HIROHIKO
68 granted patents·63 pending applications·2,230 citations·filing 1988–2010
99Inventor score
Files withSUMITOMO ELECTRIC INDUSTRIES107ITAKURA KATSUHIRO5AWAZU TOMOYUKI3NATSUHARA MASUHIRO2FINE CERAMICS CENTER1
Top patents by PatentIndex Score
131 records- 0199US7090394B2Temperature gauge and ceramic susceptor in which it is utilizedSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·478 cites·16 claims
- 0299US6963052B2Heater module for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Nov 8, 2005·417 cites·21 claims
- 0398US6460482B1Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Oct 8, 2002·383 cites·37 claims
- 0494US7268322B2Semiconductor heating apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 11, 2007·30 cites·20 claims
- 0592US6554906B1Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Apr 29, 2003·64 cites·42 claims
- 0691US6508884B2Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Jan 21, 2003·48 cites·36 claims
- 0790US6261703B1Copper circuit junction substrate and method of producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1998·Granted Jul 17, 2001·111 cites·79 claims
- 0887US6365879B1Wafer holder for semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Apr 2, 2002·40 cites·28 claims
- 0986US7576303B2Wafer holder, and wafer prober provided therewithSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Granted Aug 18, 2009·11 cites·8 claims
- 1086US6664515B2Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the patternSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Dec 16, 2003·38 cites·8 claims
- 1185US7554059B2Heater unit and semiconductor manufacturing apparatus including the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Jun 30, 2009·10 cites·21 claims
- 1285US7425838B2Body for keeping a wafer and wafer prober using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Sep 16, 2008·10 cites·21 claims
- 1384US6403510B1Aluminum nitride sintered body and manufacturing method thereofSUMITOMO ELECTRIC INDUSTRIES·Filed 2000·Granted Jun 11, 2002·24 cites·11 claims
- 1484US5732318AHeater and heating/fixing unit comprising the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1996·Granted Mar 24, 1998·35 cites·13 claims
- 1582US6392197B2Ceramic heater for toner-fixing units and method for manufacturing the heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted May 21, 2002·21 cites·8 claims
- 1682US6122170APower module board and power module using the boardSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Sep 19, 2000·71 cites·12 claims
- 1779US6384378B2Ceramic heater for toner-fixing units and method for manufacturing the heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted May 7, 2002·18 cites·9 claims
- 1878US6423400B1Susceptor for semiconductor manufacturing equipment and process for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Jul 23, 2002·29 cites·14 claims
- 1975US7045045B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 16, 2006·14 cites·38 claims
- 2074US7394043B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Jul 1, 2008·4 cites·8 claims
- 2174US7361230B2Substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 22, 2008·17 cites·23 claims
- 2274US7341969B2Aluminum nitride sintered bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Mar 11, 2008·3 cites·6 claims
- 2374US7211153B2Ceramic joined body, substrate holding structure and substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted May 1, 2007·17 cites·22 claims
- 2472US7855569B2Wafer holder for wafer prober and wafer prober equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 21, 2010·6 cites·44 claims
- 2569US5023147ACeramics-metal jointed bodySUMITOMO ELECTRIC INDUSTRIES·Filed 1989·Granted Jun 11, 1991·23 cites·10 claims
- 2668US7177536B2Fluid heating heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Feb 13, 2007·10 cites·4 claims
- 2768US6671489B2Thermal fixing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Dec 30, 2003·10 cites·18 claims
- 2865US7145106B2Heater module for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 5, 2006·1 cites·20 claims
- 2965US6716304B2Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 6, 2004·8 cites·20 claims
- 3064US7264699B2Workpiece holder for processing apparatus, and processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 4, 2007·1 cites·4 claims
- 3164US6569524B2High thermal conductivity composite material, and method for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted May 27, 2003·12 cites·12 claims
- 3263US7491432B2Ceramic susceptor for semiconductor manufacturing equipmentSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Feb 17, 2009·11 cites·8 claims
- 3363US7279048B2Semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Oct 9, 2007·8 cites·17 claims
- 3463US6770379B2Susceptor for semiconductor manufacturing equipment and process for producing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Aug 3, 2004·5 cites·13 claims
- 3563US6428741B2Aluminum nitride sintered body and method of preparing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Aug 6, 2002·5 cites·11 claims
- 3661US6174614B1Sintered aluminum nitride body and metallized substrate prepared therefromSUMITOMO ELECTRIC INDUSTRIES·Filed 1998·Granted Jan 16, 2001·17 cites·23 claims
- 3760US6548787B2Ceramic heaterSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Apr 15, 2003·11 cites·24 claims
- 3860US6271163B1Aluminum nitride sintered body and method of preparing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Aug 7, 2001·22 cites·18 claims
- 3959US7414823B2Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Aug 19, 2008·6 cites·16 claims
- 4057US6946625B2Ceramic susceptorSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Sep 20, 2005·4 cites·8 claims
- 4157US6049064AHeat fixing device for fixing a toner imageSUMITOMO ELECTRIC INDUSTRIES·Filed 1997·Granted Apr 11, 2000·12 cites·18 claims
- 4256US7090423B2Connecting structuresSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Aug 15, 2006·3 cites·18 claims
- 4356US5998043AMember for semiconductor device using an aluminum nitride substrate material, and method of manufacturing the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 1997·Granted Dec 7, 1999·21 cites·18 claims
- 4456US4999144APressure self-combustion sintering methodUNIV OSAKA·Filed 1988·Granted Mar 12, 1991·13 cites·7 claims
- 4556US2010044364A1Heating unit and the apparatus having the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2009·Application pending·0 cites
- 4655US7495460B2Body for keeping a wafer, heater unit and wafer proberSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Granted Feb 24, 2009·2 cites·10 claims
- 4755US6458444B1Ceramic substrate and polishing method thereofSUMITOMO ELECTRIC INDUSTRIES·Filed 1999·Granted Oct 1, 2002·9 cites·16 claims
- 4855US5312787ACeramics composite material and method of producing the sameFINE CERAMICS CENTER·Filed 1993·Granted May 17, 1994·18 cites·12 claims
- 4955US2009142479A1Method of Manufacturing Semiconductor Device-Fabrication Wafer HolderSUMITOMO ELECTRIC INDUSTRIES·Filed 2009·Application pending·0 cites
- 5054US7806984B2Semiconductor or liquid crystal producing deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2003·Granted Oct 5, 2010·4 cites·9 claims
Showing the top 50 of 131 patent records by PatentIndex Score.
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