Inventor · disambiguated record
Junya Hiraka
Also filed as: HIRAKA JUNYA
2 granted patents·1 pending application·5 citations·filing 2004–2013
48Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0162US9159548B2Semiconductor processing system including vaporizer and method for using sameTOKYO ELECTRON LTD·Filed 2013·Granted Oct 13, 2015·1 cites·9 claims
- 0251US7462376B2CVD method for forming silicon nitride filmTOKYO ELECTRON LTD·Filed 2004·Granted Dec 9, 2008·4 cites·12 claims
- 0351US2009186479A1Semiconductor processing system including vaporizer and method for using sameTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →