Inventor · disambiguated record
Hyeon-Ill Um
Also filed as: UM HYEON-ILL
3 granted patents·2 pending applications·28 citations·filing 2002–2007
69Inventor score
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5 records- 0190US7208878B2Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrodeSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Apr 24, 2007·13 cites·16 claims
- 0278US7119489B2Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrodeSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Oct 10, 2006·12 cites·18 claims
- 0357US6723215B2Sputtering apparatus for forming a metal film using a magnetic fieldSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Apr 20, 2004·3 cites·18 claims
- 0441US2007184188A1Method for cleaning a thin film forming apparatus and method for forming a thin film using the sameKIM YOUNG-SUN·Filed 2007·Application pending·0 cites
- 0525US2004077158A1Method of manufacturing semiconductor device through salicide processFiled 2003·Application pending·0 cites
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