Inventor · disambiguated record
Shunroku Taya
Also filed as: TAYA SHUNROKU
23 granted patents·1 pending application·422 citations·filing 1982–2007
96Inventor score
Top patents by PatentIndex Score
24 records- 0195US6310341B1Projecting type charged particle microscope and projecting type substrate inspection systemHITACHI LTD·Filed 1999·Granted Oct 30, 2001·108 cites·27 claims
- 0293US7250601B2Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring methodHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 31, 2007·15 cites·8 claims
- 0391US7928376B2Element mapping unit, scanning transmission electron microscope, and element mapping methodHITACHI LTD·Filed 2005·Granted Apr 19, 2011·15 cites·9 claims
- 0489US6703613B2Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring methodHITACHI LTD·Filed 2001·Granted Mar 9, 2004·28 cites·12 claims
- 0585US7022983B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2004·Granted Apr 4, 2006·15 cites·18 claims
- 0685US6794648B2Ultimate analyzer, scanning transmission electron microscope and ultimate analysis methodHITACHI LTD·Filed 2002·Granted Sep 21, 2004·19 cites·19 claims
- 0784US7315024B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 1, 2008·5 cites·17 claims
- 0882US7838827B2Monochromator and scanning electron microscope using the sameHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 23, 2010·4 cites·7 claims
- 0982US7067805B2Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring methodHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 27, 2006·17 cites·3 claims
- 1079US6150657AEnergy filter and electron microscope equipped with the energy filterHITACHI LTD·Filed 1998·Granted Nov 21, 2000·34 cites·15 claims
- 1176US4870283AElectric multipole lensHITACHI LTD·Filed 1988·Granted Sep 26, 1989·19 cites·10 claims
- 1276US4703180AMicrowave discharge type ion source for ion injection devicesHITACHI LTD·Filed 1985·Granted Oct 27, 1987·20 cites·3 claims
- 1375US6933501B2Ultimate analyzer, scanning transmission electron microscope and ultimate analysis methodHITACHI LTD·Filed 2004·Granted Aug 23, 2005·10 cites·2 claims
- 1474US4476393AIon implantation apparatusHITACHI LTD·Filed 1982·Granted Oct 9, 1984·20 cites·13 claims
- 1569US4634931AIon implanterHITACHI LTD·Filed 1984·Granted Jan 6, 1987·16 cites·10 claims
- 1663US5291016AElectrostatic lens arrangement of multi-stages of multi-pole electrodes and mass spectrometer using the sameHITACHI LTD·Filed 1993·Granted Mar 1, 1994·16 cites·8 claims
- 1754US6066852AElectron energy filterHITACHI LTD·Filed 1995·Granted May 23, 2000·11 cites·25 claims
- 1852US5585630AElectron energy filter and transmission electron microscope provided with the sameHITACHI LTD·Filed 1995·Granted Dec 17, 1996·10 cites·11 claims
- 1948US4599516ASpecimens rotating deviceHITACHI LTD·Filed 1983·Granted Jul 8, 1986·16 cites·10 claims
- 2046US4972083APost-acceleration detector for mass spectrometerHITACHI LTD·Filed 1990·Granted Nov 20, 1990·9 cites·5 claims
- 2143US4839523AIon implantation apparatus for semiconductor manufactureHITACHI LTD·Filed 1984·Granted Jun 13, 1989·8 cites·9 claims
- 2242US2003085350A1Ultimate analyzer, scanning transmission electron microscope and ultimate analysis methodFiled 2001·Application pending·0 cites
- 2340US4629930APlasma ion sourceHITACHI LTD·Filed 1983·Granted Dec 16, 1986·4 cites·5 claims
- 2438US4947041AAnalyzer tube for mass spectrometryHITACHI LTD·Filed 1988·Granted Aug 7, 1990·3 cites·4 claims
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