Inventor · disambiguated record
Phil Friddle
Also filed as: Friddle Phil
3 granted patents·1 pending application·5 citations·filing 2015–2018
58Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0181US10037890B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2016·Granted Jul 31, 2018·3 cites·18 claims
- 0275US9972502B2Systems and methods for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2015·Granted May 15, 2018·2 cites·9 claims
- 0353US10541141B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 0449US2018247828A1Systems for performing in-situ deposition of sidewall image transfer spacersLAM RES CORP·Filed 2018·Application pending·0 cites
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