Inventor · disambiguated record
Richard F. Landau
Also filed as: LANDAU RICHARD F
8 granted patents·242 citations·filing 1981–1996
90Inventor score
Top patents by PatentIndex Score
8 records- 0191US4407708AMethod for operating a magnetron sputtering apparatusEATON CORP·Filed 1981·Granted Oct 4, 1983·41 cites·2 claims
- 0280US4622122APlanar magnetron cathode target assemblyOERLIKON BUEHRLE INC·Filed 1986·Granted Nov 11, 1986·27 cites·18 claims
- 0371US4857160AHigh vacuum processing system and methodOERLIKON BUEHRLE INC·Filed 1988·Granted Aug 15, 1989·53 cites·30 claims
- 0467US5690744AWafer orientation alignment systemVARIAN ASSOCIATES·Filed 1996·Granted Nov 25, 1997·34 cites·8 claims
- 0562US4592800AMethod of inhibiting corrosion after aluminum etchingOERLIKON BUEHRLE INC·Filed 1984·Granted Jun 3, 1986·26 cites·21 claims
- 0659US4595452AMethod and apparatus for plasma etchingOERLIKON BUEHRLE INC·Filed 1985·Granted Jun 17, 1986·28 cites·15 claims
- 0752US6120601AWafer orientation inspection systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1996·Granted Sep 19, 2000·19 cites·25 claims
- 0846US5742393AOptical position calibration systemVARIAN ASSOCIATES·Filed 1995·Granted Apr 21, 1998·14 cites·18 claims
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