Inventor · disambiguated record
Takashi Masuyuki
Also filed as: MASUYUKI TAKASHI
4 granted patents·2 pending applications·125 citations·filing 1994–2001
79Inventor score
Technology areasG03F
Files withNIKON CORP6
Top patents by PatentIndex Score
6 records- 0186US6137562ASubstrate adjuster, substrate holder and substrate holding methodNIKON CORP·Filed 1999·Granted Oct 24, 2000·82 cites·18 claims
- 0271US5473435AMethod of measuring the bent shape of a movable mirror of an exposure apparatusNIKON CORP·Filed 1994·Granted Dec 5, 1995·25 cites·20 claims
- 0357US6545284B1Face position detection method and apparatus, and exposure method and exposure apparatus, a production method for an exposure apparatus and a production method for a semiconductor deviceNIKON CORP·Filed 2000·Granted Apr 8, 2003·6 cites·21 claims
- 0445US5638179AMethod for measuring amount of bend of moving mirrorNIKON CORP·Filed 1996·Granted Jun 10, 1997·12 cites·14 claims
- 0532US2002054231A1Exposure method, exposure apparatus, and process of production of deviceNIKON CORP·Filed 2001·Application pending·0 cites
- 0631US2001031406A1Photomask and exposure methodNIKON CORP·Filed 2000·Application pending·0 cites
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